VSN-SED-31N

Name: VSN-SED-31N
Brand: CKD
SKU: VSN-SED-31N

The VSN-SED-31N is a compact and high-speed ejector unit designed for semiconductor manufacturing processes. It features a direct acting valve for fast and stable response, making it ideal for restricted mounting spaces. Available in various nozzle diameters and flow rates, this unit ensures high performance and reliability.

Product ModelVSN-SED-31N

Product ID53006

Stock on Request

Last updated: 8/29/2026

Quantity

Key Features

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1.Compact Design:DescriptionThe VSN-SED-31N boasts an exceptionally compact design, reducing its height dimension to fit into restricted mounting spaces. This makes it perfect for applications where space is limited.
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2.High-Speed Response:DescriptionEquipped with a direct acting valve, the VSN-SED-31N achieves high-speed and stable response. It can switch ON/OFF in just 5 mm/sec or less, ensuring quick and reliable operation.
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3.Versatile Flow Rates:DescriptionAvailable in various nozzle diameters (0.4, 0.5, 0.6 mm) and intake flow rates (2 to 9.5 L/min ANR), the VSN-SED-31N caters to a wide range of applications, from high to low flow rates.
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4.Four Types of Pressure Sensors:DescriptionThe VSN-SED-31N offers four types of analog output for the pressure sensor, providing flexibility and precision in monitoring and controlling vacuum levels.

Technical Specifications

Detailed engineering parameters based on manufacturer documentation

Specifications may be subject to change without notice

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Value

Parameter

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Model

VSN-SED-31N

5.Technical Specifications:DescriptionWith specifications including a vacuum burst air flow rate of 20ℓ/min and a linearity/hysteresis of ±0.5% F.S. or less, the VSN-SED-31N ensures high accuracy and reliability in its performance. Its temperature characteristics are also ±2% F.S. or less, making it suitable for a wide range of operating conditions.