Compact, high-accuracy flow rate sensor for gas applications with bi-directional measurement and clean-room specifications.
Product ModelFSM2-D-NV
Product ID52836
Stock on Request
Last updated: 8/29/2026
Key Features
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1.Compact DesignThe FSM2-D-NV features a reduced body size, making it ideal for space-constrained environments. Its compact design allows for easy installation in various settings.
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2.High AccuracyWith a linearity of ±3% F.S. and temperature characteristics of ±0.2% F.S./°C, the FSM2-D-NV ensures precise flow rate measurements, making it suitable for critical applications.
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3.Bi-Directional MeasurementThe sensor can measure flow in both directions, providing flexibility in setup and operation. This feature is particularly useful in applications where flow direction can vary.
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4.Clean-Room SpecificationsThe FSM2-D-NV meets P70 (anti-dust generation) and P80 (oil-prohibited) specifications, ensuring it is suitable for clean-room environments. This makes it perfect for semiconductor and liquid crystal manufacturing.
Technical Specifications
Detailed engineering parameters based on manufacturer documentation
Specifications may be subject to change without notice
Parameter
Value
Parameter
Value
Type
FSM2-D
Output type
N : Display integrated type (switch output (NPN) 2 points, analog output 1 point)
Analog output type
V : Voltage output (1-5 V)
Option: Cable
None
Option: Bracket
None
Clean room specifisations
None
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5.High-Speed ResponseEquipped with a platinum sensor chip manufactured using silicon micromachining, the FSM2-D-NV offers a rapid response time of 50 ms, making it ideal for real-time monitoring and control applications.
